Solid State Technology magazine for September 2011 edition has been released. You can read latest news on process, equipment and materials technologies for semiconductor and thin-film device and microstructure manufacturing in this issue. Here are feature articles for this month.
Cover Article
Scatterometry measurement for gate ADI and AEI CD of 28nm metal gates
Measuring CD Data show that a new generation SCD tool has good sensitivity and measurement repeatability for the 28mn HKMG ADI process. Y.H. Huang, et al., United Microelectronics Corporation, Tainan Science Park, Taiwan, C.H. Lin, KLA-Tencor Corp., Milpitas, CA
Resists
Double-patterning, topcoat-less photoresists and silicon hard masks
Double-patterning, spin-on silicon hard masks, and topcoat-less resists are enabling immersion lithography to meet todays’s advanced technology node requirements. Mark Slezak, Brain Osborn, JSR Micro, Inc., Sunnyvale, CA.
Improving line roughness by using EUV assist layers
Because no single method is delivering the needed reduction in LER, combining the benefits of an assist layer material during EUV lithography and a smoothing process after lithography might be the dual-prong solution that is needed. Carlton Washburn, Brewer Science, Inc., Rolla, MO USA
EUV Masks
EUV OPC flow optimization for volume manufacturing
EUV OPC flows can be optimized to meet stringent production turn-around-time and accuracy requirements of future nodes. Kevin Lucas, Jonathan Cobb, Johnny Yeap, Munhoe Do, Synopsys inc., Mountain View, CA, USA
Tech News
Is 3D packaging where it needs to be?
More than a hundred attendees gathered at a Suss MicroTec workshop at this year’s SEMICON West (“3D Integration: Are we there yet?”) to hear technical experts from around the globe to present updates on the status of 3D IC packaging.
AMAT’s DRAM fab tools for denser transistors
Applied Materials debuted three systems at SEMICON West for next-generation DRAM chip manufacturing: the Centura DPN HDTM system to improve the gate insulator scaling, the Endura HAR Cobalt PVD system for high-aspect-ratio (HAR) contact structures, and the Endura Versa XLR W PVD system for reduced gate stack resistance.
Samsung-Grandis spotlights MRAM potential—and uphill climb
Korean semiconductor giant Samsung Electronics has acquired Grandis, a maker of spin-transfer torque random access memory (STT-RAM), a flavor of magnetic random-access memory (MRAM).
Free Download Solid State Technology Magazine September 2011
Geographic Eligibility: USA (Print or Digital), Canada, Mexico and International (Digital Only)
About Solid State Technology Magazine :
Solid State Technology is the most complete source of information for wafer fab engineers, operators, and managers; tools and materials suppliers; and semi-conductor researchers. It provides information on the latest process, equipment and materials technologies for semiconductor and thin-film device and microstructure manufacturing.
